TiNi-based thin films in MEMS applications: a review
By Y. Fu, H. Du, Wenyi Huang, Sam Zhang, M. Hu. 2004
796 citations recorded by the source corpus.
Subfields: Materials Chemistry, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/cbe217ff3a168ee04215b9452eea4125c859db38
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Materials Chemistry
- Ö. Civalek
- Bekir Akgöz
- Mohsen Asghari
- Mohammad Taghi Ahmadian
- E. Taati
- M. Kahrobaiyan
- Farzad Ebrahimi
- Jia Lou
In Mechanics of Materials
- E. Taati
- Ö. Civalek
- Mohsen Asghari
- Bekir Akgöz
- Mohammad Taghi Ahmadian
- M. Kahrobaiyan
- Farzad Ebrahimi
- Jia Lou
Citations in the corpus
- Geometrically nonlinear isogeometric analysis of functionally graded microplates with the modified couple stress theory (2017, background): “Those small-scale structures have created new challenges in modelling, for instance, when one attempts to investigate the structural behaviours of elements in micro- and nano-electro-mechanical systems [2, 3], carbon nanotube actuators [4], space and bio-engineering [5].”
- Oliver-Pharr indentation method in determining elastic moduli of shape memory alloys-A phase transformable material (2013, neutral): “(see Duerig et al., 1999; Humbeeck, 1999; Fu et al., 2004).”
- A size-dependent four variable refined plate model for functionally graded microplates based on modified couple stress theory (2015, background): “Recently, the applications of FGMs have been extended to the micro/nano engineering fields so that functionally graded (FG) micro/nano beams and plates are extensively utilized in atomic force microscopy and micro- and nano-electro-mechanical systems (MEMS and NEMS) [1–4].”
- Size-dependent elastic behavior of FGM ultra-thin films based on generalized refined theory (2009, neutral): “In their model, however, the normal bulk stress along the surface of bulk substrate was ignored as in the classical plate theories, and therefore, the surface balance equation in Gurtin and Murdoch (1975a,b) involving this bulk stress cannot be satisfied. Regarding this situation, Lu et al. (2006) a”
- Recent Advances in the Synthesis of Plasmonic Bimetallic Nanoparticles (2009, background): “presented a comprehensive review of this topic, examining the potential of TiNi thin films in these types of devices [102].”