A review of MEMS-based microscale and nanoscale tensile and bending testing

By M. Aman Haque, M. Saif. 2003

201 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/be370eafde2b0375dc56ce897c0de450e0493932