Depletion-mode InGaAs metal-oxide-semiconductor field-effect transistor with oxide gate dielectric grown by atomic-layer deposition
By Peide D. Ye, G. Wilk, B. Yang, J. Kwo, H. Gossmann, M. Hong, K. Ng, J. Bude. 2004
140 citations recorded by the source corpus.
Subfields: Electrical and Electronic Engineering, Materials Chemistry
View Paper: https://www.semanticscholar.org/paper/4c30584865abf3b6d17d820a28502db1ebfee502
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In Electrical and Electronic Engineering
In Materials Chemistry
Citations in the corpus
- Submicrometer Inversion-Type Enhancement-Mode InGaAs MOSFET With Atomic-Layer-Deposited $\hbox{Al}_{2}\hbox{O}_{3}$ as Gate Dielectric (2007, background): “Although high-performance depletion-mode GaAs MOSFETs have been previously demonstrated [10], [12]–[14],”