A vacuum packaged surface micromachined resonant accelerometer
By A. Seshia, Moorthi Palaniapan, T. Roessig, R. Howe, R. Gooch, T. Schimert, Stephen Montague. 2002
346 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/46d4368cc32d29ef0f81ec1ef7bdc714198a519e
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In Atomic and Molecular Physics, and Optics
In Electrical and Electronic Engineering
Citations in the corpus
- A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications (2007, methodology): “Although these values are low compared to many MEMS resonators [1], [2], Wojciechowski develops a more complete model for phase noise Fig.”
- An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators (2016, background): “To enhance the sensitivity of resonant accelerometers, various designs with differential resonators [11], multistage leverage mechanism [13] and flexible resonant beams [4] have been reported.”
- Enhancing Parametric Sensitivity in Electrically Coupled MEMS Resonators (2009, methodology): “The naturally high frequency sensitivity to variations in the structural properties of a micromechanical resonator [6], [7] and the quasi-digital nature of the signal [1] make this method very attractive for”
- A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit (2010, background): “The obtained sensitivity performance is close to 455 Hz/g around a central frequency of ∼58 kHz at an initial packaging pressure approximately equal to 1 mbar and an initial quality factor around 200, considerably lower than values reported in less sensitive devices [7], [8].”
- A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology (2005, methodology): “An asymmetrical lever structure was initially designed to amplify the inertial force with an amplification factor of 3 [5], followed by a symmetrical microleverage mechanism with an amplification factor of 8 [6] and 26 [1].”