A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit

By C. Comi, Alberto Corigliano, G. Langfelder, A. Longoni, A. Tocchio, B. Simoni. Journal of microelectromechanical systems, 2010

141 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/717c9a9caad0ed593180d5ea8e417460861f62ce

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1. M. Kraft
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4. Boyang Li
5. Hemin Zhang

Citations in the corpus

• An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators (2016, background): “To enhance the sensitivity of resonant accelerometers, various designs with differential resonators [11], multistage leverage mechanism [13] and flexible resonant beams [4] have been reported.”