A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications

By R. Azevedo, D. G. Jones, A. Jog, B. Jamshidi, D. R. Myers, Li Chen, Xiao-an Fu, M. Mehregany, M. Wijesundara, A. Pisano. IEEE Sensors Journal, 2007

171 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/8d684c90c3cb14fa765abe198c42598dbebd5715