A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology

By S. Su, H. Yang, A. Agogino. IEEE Sensors Journal, 2005

144 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/75b3f8fc40704d062f2652018f91d2c4a142a533

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In Biomedical Engineering

1. Honglong Chang
2. Weizheng Yuan

Citations in the corpus

• A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit (2010, background): “[8], [12] is of some tens of hertz per g unit of acceleration up to 160 Hz/g for the quite large accelerometer proposed in [11], with nominal frequencies of the resonating part on the order of 10(2) kHz.”
• An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators (2016, background): “To enhance the sensitivity of resonant accelerometers, various designs with differential resonators [11], multistage leverage mechanism [13] and flexible resonant beams [4] have been reported.”