High-Q HF microelectromechanical filters
By F. Bannon, J.R. Clark, C. T. Nguyen. IEEE Journal of Solid-State Circuits, 2000
471 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/240a5493b37c5c4bf9193ed2e8cde5eca1ab1e21
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Atomic and Molecular Physics, and Optics
- C. T. Nguyen
- Gianluca Piazza
- Eldwin Jiaqiang Ng
- Wen Chen
- Jinghui Xu
- Guoqiang Wu
- A. Pisano
- Philip Stephanou
In Biomedical Engineering
- C. T. Nguyen
- Eldwin Jiaqiang Ng
- Wen Chen
- Jinghui Xu
- Guoqiang Wu
- Gianluca Piazza
- A. Pisano
- Philip Stephanou
In Electrical and Electronic Engineering
- C. T. Nguyen
- Gianluca Piazza
- Eldwin Jiaqiang Ng
- Wen Chen
- Jinghui Xu
- Guoqiang Wu
- A. Pisano
- Philip Stephanou
Citations in the corpus
- MEMS Resonators for Frequency Reference and Timing Applications (2020, background): “popular processes reported in literature are surface micromachining [50], [108]–[110], Silicon-on-Insulator (SOI) &”
- Dissipation in nanoelectromechanical systems (2014, background): “This property can be used to detect and drive mechanical motion up to extremely high frequencies well over 1 GHz [54], these modes are typically bulk modes (as opposed to flexural modes, which are the focus of this paper).”
- Series-resonant VHF micromechanical resonator reference oscillators (2004, background): “If the oscillator amplitude is constant (which is generally true for the case of hard limiting or ALC), then amplitude noise is largely removed, and half of the total original noise power remains as phase noise [26].”
- Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuators (2005, background): “In fact, this kind of capacitive feedback control system for an electrostatic system has already been developed for MEMS filters and oscillators [ 17 ]‐[20].”
- Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators (2007, background): “Several research groups [ 1 ]–[7] have demonstrated coupled electrostatically driven microresonators for filtering applications.”
- Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance (2003, methodology): “3(a), obtained via an impedance analysis similar to that previously applied to clamped-clamped beam resonators in [7].”