Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers

By Yipeng Lu, David A. Horsley. Journal of microelectromechanical systems, 2015

169 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Mechanics of Materials, Radiology, Nuclear Medicine and Imaging

View Paper: https://www.semanticscholar.org/paper/15d5babb98463e335cf1aad421e6f367bbc7f192