Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing
By S. Polit, Jingyan Dong. IEEE/ASME transactions on mechatronics, 2011
240 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Control and Systems Engineering
View Paper: https://www.semanticscholar.org/paper/8a1f6ca6d98fb37232d07b9bbb298e1f6df33910
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In Atomic and Molecular Physics, and Optics
In Biomedical Engineering
In Control and Systems Engineering
Citations in the corpus
- Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, methodology): “In this sense, various PID controllers including integral controllers [3], proportional integral controllers [162], [163], and PID controllers [164] have been widely applied for control of commercial piezo-actuated stages.”
- Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation (2013, methodology): “Therein, 1) the flexure-hinge-based mechanism is utilized to provide motion based on elastic deformations of a solid part made from a stiff metal because of the advantages of its no sliding parts, thereby avoiding undesired nonlinear effects such as backlash and friction [12], [13]; 2) a PCA is appl”