Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS

By M. Lapisa, Göran Stemme, Frank Niklaus. IEEE Journal of Selected Topics in Quantum Electronics, 2011

140 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/0db4688f9cab757b2d58bb9b049b8b287cadc18c