Nanoimprint lithography: An old story in modern times? A review

By H. Schift. 2008

737 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/035cdbcdf93b26b0b6ef0e3e4c849433873b7970

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. T. Thomson

In Biomedical Engineering

1. Jurriaan Huskens
2. C. Acikgoz
3. G. Vancso
4. M. Hempenius
5. Junhui He
6. Lin Yao

In Electrical and Electronic Engineering

1. Jurriaan Huskens
2. C. Acikgoz
3. G. Vancso
4. M. Hempenius
5. Lin Yao
6. Junhui He

Citations in the corpus

• Technologies for Printing Sensors and Electronics Over Large Flexible Substrates: A Review (2015, neutral): “[39] focusses on nanoimprinting, Carlson et al.”
• Polymers in conventional and alternative lithography for the fabrication of nanostructures (2011, background): “The availability of polymers such as PMMA and polystyrene (PS) with a range of molar masses Mw and different polydispersities is an advantage for thermal NIL, and rheological characterization of the thermoplastic materials is available [63].”
• Directed self-assembly of block copolymers for use in bit patterned media fabrication (2013, background): “A comprehensive review was given by Schift [37].”
• Cantilever-like micromechanical sensors (2011, neutral): “is nanoimprint lithography (NIL) [123, 124].”