Polymers in conventional and alternative lithography for the fabrication of nanostructures
By C. Acikgoz, M. Hempenius, Jurriaan Huskens, G. Vancso. 2011
171 citations recorded by the source corpus.
This review provides a survey of lithography techniques and the resist materials employed with these techniques. The first part focuses on the conventional lithography methods used to fabricate complex micro- and nano-structured surfaces. In the second part, emphasis is placed on patterning with unconventional lithography techniques such as printing, molding, and embossing, and on their development into viable, high-resolution patterning technologies.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/2d2d5354e5370dc4514a3ad1f0249e57529e0673
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In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- Recent progress in antireflection and self-cleaning technology – From surface engineering to functional surfaces (2014, methodology): “(d) soft lithography [164,165], Copyright 2008 American Chemical Society.”