Cantilever-like micromechanical sensors

By Anja Boisen, Søren Dohn, Stephan Sylvest Keller, Silvan Schmid, Maria Tenje. 2011

556 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/5e5cb8c3e1342fc5eef7d76905a32ce2091dcdc9