A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives

By Yu Sun, Bradley J. Nelson, D. P. Potasek, Eniko T. Enikov. 2002

183 citations recorded by the source corpus.

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A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution (2009, background): “For some applications such as automated cell injection, multiaxis force feedback is advantageous, since a misalignment between the injection pipette and the cell can be detected [5].”
Silicon Nanotweezers With Subnanometer Resolution for the Micromanipulation of Biomolecules (2008, methodology): “[30], [31] after which we have modeled our prototype.”
Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field (2007, methodology): “tion process is based on a process that was originally developed for multi-degree-of-freedom capacitive force sensors [9], [10].”
Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback (2008, methodology): “The microgrippers were fabricated with an SOI wafer with a device layer of 50 μm using a process modified from [23] shown in figure 3.”
Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration (2005, methodology): “The high aspect ratio device described in this paper was constructed by a simple and high-yield fabrication process using DRIE on SOI wafers [13].”