Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field

By Felix Beyeler, Adrian Neild, S. Oberti, Dominik J. Bell, Yu Sun, J. Dual, Bradley J. Nelson. Journal of microelectromechanical systems, 2007

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Silicon Nanotweezers With Subnanometer Resolution for the Micromanipulation of Biomolecules (2008, background): “In fact, most of the microgrippers presented to date were dedicated to the prehension of cells, microbeads, or other micrometer-sized objects [19]–[21].”
A Review of Automated Microinjection Systems for Single Cells in the Embryogenesis Stage (2016, background): “important feedback parameter, because cells are very sensitive to the forces applied by manipulators and injectors [95]–[103].”
Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback (2008, background): “, compared to thousands of comb fingers in electrostatic microgrippers [20, 21]) also significantly helps to increase microfabrication yield.”
A Monolithic Compliant Piezoelectric-Driven Microgripper: Design, Modeling, and Testing (2013, background): “The existing research works mainly focus on integrating gripping force sensors into microgrippers to monitor the gripping force [7], [13], [14], [16].”
Autonomous Robotic Pick-and-Place of Microobjects (2010, background): “This design is different from existing microgrippers that have either only one actively actuated gripping arm [27], [28] or two interdependently active gripping arms [26].”