A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution

By Felix Beyeler, Simon Muntwyler, Bradley J. Nelson. Journal of microelectromechanical systems, 2009

164 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/74b96bfbd066e40f435023ad80499a868653d3b1

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. S. Permana
2. E. Grant
3. Glenn M. Walker
4. J. Yoder

Citations in the corpus

• A Review of Automated Microinjection Systems for Single Cells in the Embryogenesis Stage (2016, methodology): “Sensors Force sensor [30], [31], position sensor [32], [33], oocyte condition sensor (temporal and fertilization stage) [34], and needle condition (touch) sensor [29], [35].”