Large deflection micromechanical scanning mirrors for linear scans and pattern generation

By H. Schenk, Peter Dürr, T. Haase, D. Kunze, U. Sobe, H. Lakner, H. Kück. IEEE Journal of Selected Topics in Quantum Electronics, 2000

208 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/fc974f0fa6cb3c83975fa50c5e3e00ef77e682dc

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In Biomedical Engineering

1. Huikai Xie

In Electrical and Electronic Engineering

1. Huikai Xie

Citations in the corpus

• Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications (2004, methodology): “Backfilling of isolation trenches by depositing an additional dielectric layer and chemical mechanical polishing (CMP) has been used to achieve the electrically isolated mechanical coupling [11], [12].”
• MEMS Laser Scanners: A Review (2014, unknown): “been developing electrostatically actuated MEMS scanners for over a decade [87], [127].”
• Fiber-optic fluorescence imaging (2005, unknown): “Among the electrostatic actuators, vertical comb actuator”