Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications
By Veljko Milanović, G.A. Matus, Daniel T. McCormick. IEEE Journal of Selected Topics in Quantum Electronics, 2004
208 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/32f143556b6849c86fb68b1339cd654ad14aebab
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Atomic and Molecular Physics, and Optics
In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- MEMS Laser Scanners: A Review (2014, methodology): “(a) Gimbal-less silicon mirror with three degrees of freedom (tip-tilt-piston) [97].”
- An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs (2009, methodology): “Electrostatic, electrothermal, and piezoelectric actuators have been used as the driving mechanisms in previously reported TTP mirrors [ 10 ]–[19].”
- A Survey on Acquisition, Tracking, and Pointing Mechanisms for Mobile Free-Space Optical Communications (2018, background): “Gimbal-less designs of MEMS DMs are engineered to perform tip/tilt motions at high speed for both axes while requiring low power [65].”
- A Review of Phased Array Steering for Narrow-Band Electrooptical Systems (2009, methodology): “Milanovic et al. 2004 demonstrated an electrostatic micromirror that has a mirror size of 0.6 mm and a response time of 0.2 ms [ 84 ].”
- MEMS Mirrors for LiDAR: A Review (2020, background): “One electrostatic MEMS mirror achieved an FoM over 1 because of its large quasi-static scan angle [66], and a typical electrostatic MEMS mirror design is shown in Figure 8b [68].”