A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches

By W. V. Spengen, Robert Puers, R. Mertens, I. Wolf. 2004

260 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/fbeacebbf2bfa0bbf2e8a26b4eb18ed4c11954dd

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Daniela Rus
2. Christopher G. Levey
3. Igor Paprotny
4. Bruce Randall Donald

In Electrical and Electronic Engineering

1. Daniela Rus

Citations in the corpus

• An untethered, electrostatic, globally controllable MEMS micro-robot (2006, background): “Since the voltage on the device must be maintained above zero for considerable lengths of time, it is possible for static charge to accumulate in trap sites within the electrode insulation [43]–[45].”
• Vibration and shock reliability of MEMS: modeling and experimental validation (2011, unknown): “(creep) [7, 8], dielectric charging [9, 10], electrical breakdown”
• Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes (2007, background): “4, among other phenomena and the resulting vanishing of the pullout bias that leads to an irreversible stiction [5], [6], [12], [13].”