Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes

By X. Rottenberg, I. D. Wolf, Bart Nauwelaers, W. Raedt, H. Tilmans. Journal of microelectromechanical systems, 2007

156 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/2cd3189f15b296c0d0fca438dccd09afde187555