A contribution to the flow behaviour of thin polymer films during hot embossing lithography

By H. Scheer, H. Schulz. 2001

210 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/fba27c6b860b340d57c943c0646f6b39d8e274e1

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Jurriaan Huskens
2. C. Acikgoz
3. G. Vancso
4. M. Hempenius
5. Junhui He
6. Lin Yao

In Electrical and Electronic Engineering

1. Jurriaan Huskens
2. C. Acikgoz
3. William P. King
4. G. Vancso
5. M. Hempenius
6. Lin Yao
7. Junhui He

Citations in the corpus

• Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography (2005, background): “This wetting behavior has been observed in [8, 9, 20].”
• Polymers in conventional and alternative lithography for the fabrication of nanostructures (2011, background): “Pattern density is not a problem for this technique in contrast to thermal NIL [78,94].”