Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography

By P. Schunk, William P. King, Amy C. Sun, H. Rowland. 2005

195 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/0646ca520118b10785378d294fcca791e1d5b17e