Mechanical properties of silicones for MEMS

By F. Schneider, T. Fellner, Jürgen Wilde, Ulrike Wallrabe. 2008

446 citations recorded by the source corpus.

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Extended PDMS stiffness range for flexible systems (2015, unknown): “Much work has been done into the investigation of the mechanical properties of PDMS and their potential tunability [24, 26, 21, 27, 28, 16, 29, 30, 17, 31, 4, 32, 33, 34, 35].”
Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations (2008, background): “We demonstrated this concept for a differential amplifier (10), in which we divided the circuit into 4 sections, each of which forms an island connected by metal lines on pop-up bridges.”
Properties and Applications of PDMS for Biomedical Engineering: A Review (2021, background): “The PDMS solution is poured over the master mould and then cured in the oven [23].”
Mechanical characterization of bulk Sylgard 184 for microfluidics and microengineering (2014, methodology): “1 MPa) [21] has no defined curing temperature conditions and lies at the upper end of the range of values reported in the literature: (1–9) MPa [16, 18, 20].”
Soft Material Characterization for Robotic Applications (2015, unknown): “30,31 Although no general theory exists to predict complete viscoelastic elas-tomeric behavior a priori , progress has been made describing certain aspects of elastomeric behavior.”