Recent Progress in Materials Issues for Piezoelectric MEMS
By Paul Muralt. 2008
317 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry
View Paper: https://www.semanticscholar.org/paper/f70496b91e017a0a4c7151019a1b60d183de14c8
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In Biomedical Engineering
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Citations in the corpus
- Piezoelectric thin films: an integrated review of transducers and energy harvesting (2016, background): “piezoelectric thin films as functional materials is evident from their incorporation into micromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) [4, 5].”
- Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview (2014, unknown): “AlN thin films, deposited in monocrystalline and polycrystalline forms on different substrates (semiconductor, metal and dielectric), are being used in a variety of MEMS and MOEMS (Micro-OptoMechanical Systems) devices due to their compatibility with CMOS (complimentary metal-oxide semiconductor) fa”
- Piezoelectric MEMS sensors: state-of-the-art and perspectives (2009, background): “piezoelectric materials with a wurtzite crystal structure [38].”