Piezoelectric MEMS sensors: state-of-the-art and perspectives

By Srinivas Tadigadapa, K. Mateti. 2009

559 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/d410341f79b62b5af236258a2ef72a95267cb6fb

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. V. Dodonov
2. Jonathan P. Dowling

In Biomedical Engineering

1. Chengkuo Lee
2. Huicong Liu
3. C. Tay
4. V. Dodonov
5. Jungho Ryu
6. Takeshi Kobayashi
7. Stephane Evoy
8. Dan Sameoto

In Electrical and Electronic Engineering

1. Chengkuo Lee
2. Huicong Liu
3. C. Tay
4. V. Dodonov
5. Jungho Ryu
6. Takeshi Kobayashi
7. Stephane Evoy
8. Dan Sameoto

Citations in the corpus

• Review of piezoelectric micromachined ultrasonic transducers and their applications (2017, background): “However, thin-film-based devices can have higher sensitivity as they easily deform with a small amount of stress [7].”
• Current status of the dynamical Casimir effect (2010, background): “A concrete proposal relating DCE with the laser-illuminated superconductors was made in [93], where the superconducting stripline resonator (a ring having a radius of 6.39 mm and width 347 µm composed of an NbN film of 8 nm thickness deposited on a sapphire wafer [94]) was considered as a promising ”
• A review of piezoelectric polymers as functional materials for electromechanical transducers (2014, background): “This led to different piezoelectric MEMS (or, briefly, piezoMEMS) devices that are commonly used now in the automotive industry, smart phones and other everyday applications [4].”
• A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz (2012, background): “By converting mechanical strain into electricity based on direct piezoelectric effect, piezoelectric energy harvesters have received much attention due to the simple configuration and high conversion efficiency (Saadon and Sidek 2001; Anton and Sodano 2007; Tadigadapa and Mateti 2009).”
• Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power (2011, background): “Because of the advantages of simple configuration and high conversion efficiency, they have received much attention [11]–[15].”