Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview

By Mariana Amorim Fraga, Humber Furlan, R. Pessoa, Marcos Massi. 2014

136 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c6c1baada39b0e55929693757a3a294d29bc24a9