A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate

By S. E. Alper, Tayfun Akin. Journal of microelectromechanical systems, 2005

165 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/e1b1fedfa119d2cbd332faa46c0406f11b4355c4

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. Ahmed Emira
2. Ahmed K. S. Abdel Aziz
3. K. Khirallah
4. Amro M. Elshurafa
5. Hani H. Tawfik
6. Sherif Sedky

Citations in the corpus

• Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators (2011, methodology): “A behavioral model for the famous mass–spring–damper system was built previously in [32] using Simulink in an effort to model the performance of a MEMS gyroscope.”