The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting

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Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film (2009, methodology): “Shen et al [13] and Fang et al [11] successfully developed a PZT MEMS power-generating device based on the {3–1} mode of piezoelectric transducers that uses top and bottom laminated electrodes.”
Modeling and Characterization of Piezoelectric $d_{33}$ -Mode MEMS Energy Harvester (2010, background): “Most micromachined energy harvesters were also designed to operate in the d31 piezoelectric mode [8]–[11].”
A review of vibration-based MEMS piezoelectric energy harvesters (2011, methodology): “[15], designed and fabricated a PZT cantilever MEMSbased micro-generator with an integrated Si proof mass, that can generate 2.”
Investigation of a MEMS piezoelectric energy harvester system with a frequency-widened-bandwidth mechanism introduced by mechanical stoppers (2012, neutral): “Most EHs have been designed to vibrate at relatively high resonant frequency in order to achieve high output power [11–15], since the power efficiency is proportional to the vibration frequency, which needs to match with”
Recent Progress on PZT Based Piezoelectric Energy Harvesting Technologies (2016, background): “Moreover, tiny piezoelectric devices fabricated by the MEMS process can be easily integrated in the micro-electronics that require the power source of μW level [43–45].”