Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film

By Bor-Shiun Lee, Shun-Chiu Lin, Wen-Jong Wu, Xuan-Yu Wang, Pei-Zen Chang, Chih-Kung Lee. 2009

193 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Civil and Structural Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/80099891b2e45649bdf87ebc970796690f9f408d

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In Biomedical Engineering

In Civil and Structural Engineering

In Mechanical Engineering

Citations in the corpus

A review of vibration-based MEMS piezoelectric energy harvesters (2011, background): “Hence to overcome this high voltage requirement it is proposed to use the inter-digitated electrodes instead of the proposed PZT parallel electrodes [19–21].”
Piezoelectric energy harvesting from flow-induced vibration (2010, unknown): “Lee et al [10] developed a piezoelectric energy harvester which can provide an output voltage of 2.675 VPP and an output power of 2.765 μW when it is excited in the 31 mode.”
A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits (2017, methodology): “This is reasonably good performance compared to the other MEMS based piezoelectric energy harvesters (Lee et al. 2009).”
Revisit of series-SSHI with comparisons to other interfacing circuits in piezoelectric energy harvesting (2010, unknown): “Amongst them, piezoelectric vibration-to-electricity converters have been viewed as being superior to other means, as they have high electromechanical coupling, no external voltage source requirement and they are particularly attractive for use in MEMS [15, 20, 40] and nanosystems [28, 38].”
A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz (2012, background): “However, most reported piezoelectric MEMS energy harvesters have high resonant frequencies (normally above 200 Hz) (Renaud et al. 2008; Liu et al. 2008; Shen et al. 2009; Elfrink et al. 2009; Lee et al. 2009; Park et al. 2010) or require high acceleration levels (normally above 1g).”
A review of energy harvesting using piezoelectric materials: state-of-the-art a decade later (2008–2018) (2019, methodology): “Various piezoelectric MEMS energy harvesting designs including (a) thin-film PZT cantilever (reprinted from [244], Copyright 2005, with permission from Elsevier), (b) high aspect ratio beam (reprinted from [245], Copyright 2006, with permission from Elsevier), (c) cantilever array (reprinted from [2”