Modeling and Characterization of Piezoelectric $d_{33}$ -Mode MEMS Energy Harvester

By J. C. Park, J. Y. Park, Yoon-Pyo Lee. Journal of microelectromechanical systems, 2010

170 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/1cb28e67366543e3ea7478889df9d01cbcfbd18c

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Chengkuo Lee
2. Huicong Liu
3. C. Tay
4. Takeshi Kobayashi
5. Dong-Joo Kim
6. C. Quan
7. Xinge Guo
8. Long Liu

In Electrical and Electronic Engineering

1. Chengkuo Lee
2. Huicong Liu
3. C. Tay
4. Takeshi Kobayashi
5. C. Quan
6. Shahrzad Towfighian
7. Wei Yang

In Mechanical Engineering

1. Chengkuo Lee
2. Huicong Liu
3. C. Tay
4. Takeshi Kobayashi
5. Dong-Joo Kim
6. C. Quan
7. Shahrzad Towfighian
8. Wei Yang

Citations in the corpus

• Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power (2011, background): “Currently, most investigations for power generation of vibration-based piezoelectric EHs focus on the configuration of cantilever beam with or without proof mass in the form of unimorph, series triple layer bimorph, parallel triple layer bimorph in the d31 mode and d33 mode [16]–[22].”
• A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits (2017, unknown): “…et al. 2011; Jeon et al. 2005; Lee et al. 2009; Lei et al. 2011; Marzencki et al. 2007; Massaro et al. 2011; Miller et al. 2011; Muralt et al. 2009a; Park, Park, and Lee 2010; Roundy, Wright, and Rabaey 2003a, 2003b; Shen et al. 2008; Van Schaijk et al. 2008; Xu et al. 2012b; Yen et al. 2011).”
• Comparison of MEMS PZT Cantilevers Based on $d_{31}$ and $d_{33}$ Modes for Vibration Energy Harvesting (2013, background): “output power of a d33 mode PEH, but its power is typically lower than that of d31 mode PEHs [10], [11].”
• A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz (2012, background): “However, most reported piezoelectric MEMS energy harvesters have high resonant frequencies (normally above 200 Hz) (Renaud et al. 2008; Liu et al. 2008; Shen et al. 2009; Elfrink et al. 2009; Lee et al. 2009; Park et al. 2010) or require high acceleration levels (normally above 1g).”