Integrated microfluidics based on multi-layered SU-8 for mass spectrometry analysis

By J. Carlier, S. Arscott, V. Thomy, J. Fourrier, F. Caron, J. Camart, C. Druon, P. Tabourier. 2004

145 citations recorded by the source corpus.

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Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem—a review (2007, background): “A very thin layer of SU-8 can act as glue to prevent the occlusion in the microchannels [187, 188].”
Fabrication of multi-layer SU-8 microstructures (2006, background): “Differences in exposure (exposure non-uniformities) throughout the photoresist layer can lead to partial cross-linking (curing) of the resist, residual stress build-up and poor adhesion to the underlying silicon wafer, which can subsequently result in feature degradation, crack-like distortions and ”
Review of polymer MEMS micromachining (2015, background): “films following spin coating [30, 196], during the soft-bake”
Drop on demand in a microfluidic chip (2008, methodology): “This base layer method presented in Carlier et al [45] improves adhesion of SU-8 to the wafer.”
A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films (2005, background): “Many papers have reported bonding technologies performed following the spin coating [18], during the soft-bake step [19–21] or after the crosslink step [22–24].”