Ultralow Power Silicon Photonics Thermo-Optic Switch With Suspended Phase Arms

By Q. Fang, Junfeng Song, T. Liow, H. Cai, Mingbin Yu, Guo-Qiang Lo, D. Kwong. IEEE Photonics Technology Letters, 2011

167 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/e5037b18c621247186cb0a3b6b239c658d65b95c

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In Electrical and Electronic Engineering

1. C. Li

Citations in the corpus

• Review of Silicon Photonics Foundry Efforts (2014, methodology): “This can come in the form of process enhancements to the platform such as integrating a dual Si-SiN waveguide system [24], or adding an oxide release step to form suspended thermal phase-shifters [25].”
• Multilayer Silicon Nitride-on-Silicon Integrated Photonic Platforms and Devices (2015, unknown): “Lateral under-cut trenches for thermal isolation [28] and suspended spot size converters [29] can be incorporated before the deep trench”