Multilayer Silicon Nitride-on-Silicon Integrated Photonic Platforms and Devices

By Wesley D. Sacher, Ying Huang, Guo-Qiang Lo, Joyce K. S. Poon. Journal of Lightwave Technology, 2015

204 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a21a5ed8e502e834a6cf9e4748513ff2e5475ff8

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In Atomic and Molecular Physics, and Optics

1. Martijn J. R. Heck

In Electrical and Electronic Engineering

1. Martijn J. R. Heck

Citations in the corpus

• Highly integrated optical phased arrays: photonic integrated circuits for optical beam shaping and beam steering (2017, background): “heterogeneous silicon indium phosphide integration, also known as the hybrid silicon platform [8]; the integration of silicon with silicon nitride [9, 10]; or even silicon, silicon nitride, and indium phosphide all together in a single process flow [11, 12].”
• Edge Couplers in Silicon Photonic Integrated Circuits: A Review (2020, methodology): “from the University of Toronto [134,137,138], Lo et al.”