Thin Film Piezoelectrics for MEMS

By Susan E. Trolier-McKinstry, Paul Muralt. 2004

939 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/e441f9cc5d2af32411d17f2322d930898e8a1183

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. I. Lien
2. Y. C. Shu
3. Alper Erturk
4. Humber Furlan
5. R. Pessoa
6. Mariana Amorim Fraga
7. Marcos Massi
8. Q. Deng

In Electrical and Electronic Engineering

1. I. Lien
2. Y. C. Shu
3. Humber Furlan
4. R. Pessoa
5. Mariana Amorim Fraga
6. Marcos Massi
7. Srinivas Tadigadapa
8. Susan E. Trolier-McKinstry

In Materials Chemistry

1. Q. Deng
2. Humber Furlan
3. R. Pessoa
4. Mariana Amorim Fraga
5. Marcos Massi
6. Srinivas Tadigadapa
7. Susan E. Trolier-McKinstry
8. C. Richards

Citations in the corpus

• Piezoelectric MEMS sensors: state-of-the-art and perspectives (2009, background): “The subscript f , in equations (3) and (4), is added to note that this is not the intrinsic property of the piezoelectric material, but it includes properties of the substrate; the effective thin film piezoelectric coefficients can be calculated as [1, 3]”
• Fabrication of composite PVDF-ZnO nanofiber mats by electrospinning for energy scavenging application with enhanced efficiency (2015, background): “Because of piezoelectric properties, ZnO is one of the viable alternatives to improving performance of nanogenerators [41, 42].”
• Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging (2015, background): “The effective piezoelectric response of PZT thin films is usually very different from that of bulk PZT, particularly because of the in-plane clamping of the film by the substrate, as well as from the residual stress in the film [42].”
• An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications (2012, background): “These include high stiffness, a high material figure of merit for sensitivity (g31), low dielectric loss, and high intrinsic signal-to-noise ratio [29].”
• Nanoscale flexoelectric energy harvesting (2014, background): “…piezoelectric energy harvesting have also received growing attention in the last few years due to the developments in ferroelectric thin films for MEMS (Trolier-McKinstry and Muralt, 2004; Jeon, 2005; Muralt et al., 2009) and non-ferroelectric nano wires NEMS (Wang and Song, 2006; Xu et al., 2010).”