An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

By M. D. Williams, Benjamin A. Griffin, Tiffany N. Reagan, J. Underbrink, Mark Sheplak. Journal of microelectromechanical systems, 2012

163 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/f234c16ec4f934bab3eae81b665218559ca0eefd

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Humber Furlan
2. R. Pessoa
3. Mariana Amorim Fraga
4. Marcos Massi

In Electrical and Electronic Engineering

1. Humber Furlan
2. R. Pessoa
3. Mariana Amorim Fraga
4. Marcos Massi

Citations in the corpus

• Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview (2014, background): “2011) and (2) AlN micromachined piezoelectric microphone for aircraft fuselage arrays used to identify aircraft noise sources and/or assess the effectiveness of noise-reduction technologies (Williams et al. 2012).”