A physical model to predict stiction in MEMS

By W. V. Spengen, Robert Puers, I. D. Wolf. 2006

194 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/e426dccf5a7634494cd0921bc8b579feed385ace

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Romesh C. Batra
2. Maurizio Porfiri
3. Davide Spinello
4. Marin Soljačić
5. Peter T. Rakich
6. Kalpataru Das

In Electrical and Electronic Engineering

1. Romesh C. Batra
2. Maurizio Porfiri
3. Davide Spinello
4. Marin Soljačić
5. Peter T. Rakich
6. Kalpataru Das

Citations in the corpus

• Review of modeling electrostatically actuated microelectromechanical systems (2007, background): “Stiction in MEMSs due to van der Waals forces has been studied in [118], and in [119], the effect on the pull-in parameters of cantilever NEM switches is investigated.”
• Trapping, corralling and spectral bonding of optical resonances through optically induced potentials (2007, background): “Short-range interactions such as van der Waals and capillary forces need not significantly affect the operation of such devices if the distance q between interacting surfaces is kept greater than approximately 20 to 30 nm (corresponding to the retarded regime of van der Waals interaction”