Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators

By Ryan Hickey, M. Kujath, T. Hubbard. 2002

137 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanical Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/d9a9de12f03fda2140d44ac54e4aae4abafd05e9

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. M. Ellis
2. N. Sarkar
3. L. Lee
4. A. Geisberger
5. N. Chronis
6. G. Skidmore
7. J. Qiu

Citations in the corpus

• Electrothermally activated SU-8 microgripper for single cell manipulation in solution (2005, background): “They operate though at relatively high voltages (3–10 V) and extremely high temperatures (400–700 ) [32], [33], conditions incompatible for use with any biological sample.”
• Electrothermal properties and modeling of polysilicon microthermal actuators (2003, methodology): “Similar work is presented by Hickey et al. [ 12 ].”