Electrothermally activated SU-8 microgripper for single cell manipulation in solution

By N. Chronis, L. Lee. Journal of microelectromechanical systems, 2005

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Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback (2008, background): “Compared to other types of microactuators such as electrostatic [12, 15, 20, 21], piezoelectric [10, 18] and U-beam electrothermal actuators [16, 17], V-beam electrothermal actuators require a much smaller chip area and low driving voltage, produce large forces, and generate large displacements thro”
Autonomous Robotic Pick-and-Place of Microobjects (2010, background): “This design is different from existing microgrippers that have either only one actively actuated gripping arm [27], [28] or two interdependently active gripping arms [26].”
A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric force sensors: a numerical and experimental study (2005, neutral): “Poly-Si Electrostatic 500 9 — [6] TiNi Shape memory alloy 1000 180 17 [12] SU-8 Electro-thermal 650 15 — [13] Piezoelectric 2000 170 — [14] Titanium Piezoelectric 6000 1000 20 [4] ICPF Electroactive polymer 1200 — — [10] Al/Cr Pneumatic 1000 300 — [15]”
Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “There are numerous MEMS devices around us such as micro accelerometers [45, 46], DMD [45, 47, 48], MEMS pressure sensors [49, 50], micropumps [58-60], microvalves [61], optical switches [62, 63], inkjet heads, microgrippers [64, 65], and microactuators [66-70].”