Review of the filtered vacuum arc process and materials deposition
By P. Martin. 2001
242 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Mechanical Engineering, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/d6eb4bba96827f17b8c7d47a78b8e10f059eafce
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In Atomic and Molecular Physics, and Optics
In Mechanical Engineering
In Mechanics of Materials
Citations in the corpus
- A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS) (2014, background): “surface oxidized), acceptable for some applications like hard coatings on tools [278, 279]; optical and other applications require filtered arcs [245, 280, 281].”