A review of feedforward control approaches in nanopositioning for high-speed spm

By G. Clayton, S. Tien, Kam K. Leang, Qingze Zou, Santosh Devasia. 2009

403 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Control and Systems Engineering, Structural Biology

View Paper: https://www.semanticscholar.org/paper/d53bd3f504ceb11a93a4f45bd7e652eae9603d43

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Han Ding
2. Chun-Yi Su
3. Guoying Gu
4. Limin Zhu
5. Sergej Fatikow

In Control and Systems Engineering

1. Limin Zhu
2. Guoying Gu
3. Han Ding
4. Sergej Fatikow
5. Chun-Yi Su
6. Mou Chen
7. Shuzhi Sam Ge
8. Thanh Nho Do

Citations in the corpus

• Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey (2016, methodology): “In general, vibration modeling is to develop linear vibrational dynamics models for the piezo-actuated stages without considering the hysteresis nonlinearity [8].”