A novel method for the fabrication of high-aspect ratio C-MEMS structures

By Chunlei Wang, Guangyao Jia, Lili Taherabadi, M. Madou. Journal of microelectromechanical systems, 2005

237 citations recorded by the source corpus.

Subfields: Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/c8abe7a15436a97b116e2ee0e36410166912b4e0

Citations in the corpus

• Review of polymer MEMS micromachining (2015, unknown): “the production of conductive carbon fibers [207].”
• SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography (2007, unknown): “Solvent content and solvent gradients may also vary depending on the equipment used for soft baking [69, 70].”