High-performance surface-micromachined inchworm actuator
By M. D. de Boer, D. Luck, W. Ashurst, Roya Maboudian, A. Corwin, J. Walraven, J. Redmond. Journal of microelectromechanical systems, 2003
158 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/39c59f0afdff3e2a0ea26e473ae1bce81abf1678
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Electrical and Electronic Engineering
In Mechanics of Materials
- Shenjie Zhou
- Ö. Civalek
- Bekir Akgöz
- Mohsen Asghari
- M. Baghani
- Mohammad Taghi Ahmadian
- M. Şimşek
- M. Kahrobaiyan
Citations in the corpus
- Static and dynamic analysis of micro beams based on strain gradient elasticity theory (2009, background): “Micro beams have become prevalent in the fields of MEMS such as those in sensors [1,2] and actuators [3,4] in which thicknesses of beams are typically on the order of microns and sub-microns.”