"Millipede": a MEMS-based scanning-probe data-storage system

By Evangelos Eleftheriou, T. Antonakopoulos, G. Binnig, Giovanni Cherubini, M. Despont, Ajay Dholakia, U. Dürig, Mark A. Lantz, H. Pozidis, H. Rothuizen and 1 more. Digest of the Asia-Pacific Magnetic Recording Conference, 2002

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Design and input-shaping control of a novel scanner for high-speed atomic force microscopy (2008, methodology): “The atomic force microscope (AFM) [2] has become one of the most important tools to address the nanometer scale and is used for imaging applications [4] as well as for surface characterization [15], lithography [11], data storage [6], and handling of nanometer sized particles [9].”
A Survey of Control Issues in Nanopositioning (2007, background): “One of the most advanced approaches in probe-storage is based on a thermomechanical READ/WRITE process on thin polymer films [210], [211].”
Design and Modeling of a High-Speed AFM-Scanner (2007, methodology): “…[10], [11] and directly actuated cantilevers [12], [13], by improving the mechanical design of the scanner [14]–[16], by exploiting alternative scanning methods [17], and by utilizing advanced control methods for faster scanning [5], [6], [18]–[22] and faster vertical motion [7], [23], [24].”