Development of piezoelectric micromachined ultrasonic transducers

By F. Akasheh, Todd Myers, J. Fraser, S. Bose, A. Bandyopadhyay. 2004

265 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Mechanics of Materials, Radiology, Nuclear Medicine and Imaging

View Paper: https://www.semanticscholar.org/paper/b4bfa2afec2657e667cce3a48798d455a52ad4a9

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Srinivas Tadigadapa
2. Yipeng Lu
3. Susan E. Trolier-McKinstry
4. David A. Horsley
5. K. Mateti

In Mechanics of Materials

1. Srinivas Tadigadapa
2. K. Mateti

Citations in the corpus

• Piezoelectric MEMS sensors: state-of-the-art and perspectives (2009, background): “For further details, the interested reader is directed to dedicated reviews of pMUTs [16, 220].”
• Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging (2015, methodology): “In many early devices, a boron-doped Si layer was used as the etch-stop layer [26,30,57].”
• Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers (2015, background): “two-dimensional (2D) transducer arrays needed for 3D imaging [6], [7].”