Capacitors with an Equivalent Oxide Thickness of <0.5 nm for Nanoscale Electronic Semiconductor Memory

By Seong Keun Kim, Sang Woon Lee, J. Han, Bora Lee, Seungwu Han, C. S. Hwang. 2010

218 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b216a6e74ce503dce4fd53ecccdfa9ab0376f63a