The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge

By Johan Böhlmark, M. Lattemann, J. Gudmundsson, A. Ehiasarian, Y. A. Gonzalvo, N. Brenning, Ulf Helmersson. 2006

311 citations recorded by the source corpus.

Subfields: Computational Mechanics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/af1cdb555e83f7ec5097eee035d4d157191d65ab