Stiction, adhesion energy, and the Casimir effect in micromechanical systems

By Eyal Buks, Michael L. Roukes. 2000

331 citations recorded by the source corpus.

We measure the adhesion energy of gold using a micromachined cantilever beam. Stress and stiffness of the beam are characterized by measuring the spectrum of mechanical vibrations and the deflection due to external force. We induce stiction between the beam and a nearby surface, employing capillary forces to determine the adhesion energy g. The obtained value g50.06 J/m 2 is a factor of 6 smaller than that predicted by idealized theory. This discrepancy may arise from surface roughness or an adsorbed layer intervening between the contacting surfaces in these mesoscopic structures.

Subfields: Atomic and Molecular Physics, and Optics, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/a6887a4916e7ea285b8aa3d8acaae4e7cdc97a59

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In Atomic and Molecular Physics, and Optics

In Materials Chemistry

Citations in the corpus

Nonlinear behavior for nanoscale electrostatic actuators with Casimir force (2005, background): “Potential applications of Casimir effect in nanoelectromechanical systems (NEMS) and nanotechnology are studied theoretically and experimentally [2–10].”
Ultrastrong adhesion of graphene membranes. (2011, background): “Our measured adhesion energies are approximately four orders of magnitude larger than adhesion energies commonly found in micromechanical systems, where van der Waals forces across non-contacting regions between asperities play a significant role, and approximately five times larger than adhesion in”
Review of modeling electrostatically actuated microelectromechanical systems (2007, background): “phenomenon in NEMSs can be found in [104–108].”
Nonlinear damping in a micromechanical oscillator (2009, background): “Further miniaturization is also motivated by the quest for mesoscopic quantum effects in mechanical systems [11–18].”
Materials perspective on Casimir and van der Waals interactions (2015, background): “This is especially relevant for nano- and micro-mechanical devices, such as most electronic gadgets we use everyday, where stiction and adhesion appear as parasitic effects (Buks and Roukes, 2001).”