Recombination activity of contaminated dislocations in silicon: A model describing electron-beam-induced current contrast behavior

By V. Kveder, M. Kittler, W. Schröter. 2001

229 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a4c59cb3266a2223022b713f319291ce287ebdeb

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In Atomic and Molecular Physics, and Optics

  1. R. Falster
  2. V. Voronkov
  3. K. Bothe

In Electrical and Electronic Engineering

  1. R. Falster
  2. V. Voronkov
  3. K. Bothe

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