Electromechanical considerations in developing low-voltage RF MEMS switches
By Dimitrios Peroulis, Sergio P. Pacheco, Kamal Sarabandi, Linda P. B. Katehi. 2003
298 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/a3e3930878fbe78061401412aee913475eb93215
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In Atomic and Molecular Physics, and Optics
In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuators (2005, background): “In fact, some parallel-plate actuators have also been fabricated with top and bottom fixed electrodes, enabling two pulled-in positions as well [16].”
- Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage (2006, methodology): “Another method is increasing the electrostatic area (Afrang and Abbaspour 2002b), and the third one is decreasing the spring constant of the beams (Hah and Hong 2000; Park et al. 2001; Chang et al. 2003; Balaraman and Bhattacharya 2002; Borwick et al. 2003; Peroulis et al. 2003 ).”